Inner shield for a substrate processing chamber



FIG. 1 is a top isometric view of the first embodiment for an inner shield for a substrate processing chamber, according to the new design.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a front elevation view thereof.

FIG. 5 is a back elevation view thereof.

FIG. 6 is a right side elevation view thereof.

FIG. 7 is a left side elevation view thereof.

FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2.

FIG. 9 is a top isometric view of the second embodiment for an inner shield for a substrate processing chamber, according to the new design.

FIG. 10 is a top plan view thereof.

FIG. 11 is a bottom plan view thereof.

FIG. 12 is a front elevation view thereof.

FIG. 13 is a back elevation view thereof.

FIG. 14 is a right side elevation view thereof.

FIG. 15 is a left side elevation view thereof; and,

FIG. 16 is a cross-sectional view taken along line 16-16 in FIG. 10.

The broken lines in FIGS. 1-16 show portions of an inner shield for a substrate processing chamber which form no part of the claimed design. 

CLAIM The ornamental design for an inner shield for a substrate processing chamber, as shown and described. 